文献类型：期刊文献

英文题名：An Electric Field-Enhanced Ultrahigh Energy Density Micro-Supercapacitors Printed by High Precision Maskless Photolithography

作者：Chu, Tianshu[1,2,3];Zhou, Ze[1,2,3];Ivankin, Andrey[4];Tang, Xiaohui[5];Ding, Shaowei[4];Zhang, Bowei[1,2,3];Xuan, Fu-Zhen[1,2,3]

机构：[1]Shanghai Key Lab Intelligent Sensing & Detect Tech, Shanghai 200237, Peoples R China;[2]Minist Educ, Key Lab Pressure Syst & Safety, Shanghai 200237, Peoples R China;[3]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China;[4]TERA Print LLC, Skokie, IL 60077 USA;[5]Shanghai Jiao Tong Univ, Ruijin Hosp, Inst Med Chips, Sch Med, Shanghai 200025, Peoples R China

年份：2025

卷号：21

期号：33

外文期刊名：SMALL

收录：;EI(收录号：20252618688769);WOS:【SCI-EXPANDED(收录号:WOS:001558580900005)】；

基金：This work was supported by the National Natural Science Foundation of China (Nos. 52105145 and 12274124), the Shanghai Pilot Program for Basic Research (No. 22TQ1400100-6), and the Fundamental Research Funds for the Central Universities.

语种：英文

外文关键词：carbon; electric field-enhanced effects; micro- supercapacitors; photolithography

摘要：Micro-supercapacitors (MSCs) are crucial for powering micro-electromechanical systems (MEMS) and microelectronic devices due to their miniature size and high energy storage capacity. However, the achievement of printable high-energy-density MSCs with smaller size is still challenging. Herein, high-precision (2 mu m) maskless lithography is utilized on Submicron (SU-8) photoresist successfully printing an ultrahigh energy density MSCs on silicon substrates with an effective electrode area of only 0.01 mm2. By incorporating the design of bent electrodes, the electric field strength between electrodes is greatly enhanced and leads to the improvements of device performance. The fabricated MSCs exhibit an unprecedently high area-specific capacitance of up to 2.13 mF cm-2 at a scan rate of 10 mV s-1, and excellent cyclic stability with the MSCs retaining 91.7% of their capacitive properties after 4000 cycles. Moreover, the MSCs achieve an ultrahigh energy density of 218 mu Wh cm-2, surpassing both traditional carbon-based MSCs and various hybrid MSCs. This work is expected to promote the broader application of MSCs in MEMS technology and microelectronic devices.