文献类型：期刊文献

中文题名：ICP-MS法测定电子级高纯盐酸中的痕量元素

英文题名：Determination of trace elements in electronic grade high purity hydrochloric acid by ICP-MS

作者：周豪[1];魏永明[1];杨虎[1]

机构：[1]华东理工大学化学工程联合国家重点实验室,功能膜科学与工程研究中心,上海200237

年份：2023

卷号：43

期号：12

起止页码：221

中文期刊名：现代化工

外文期刊名：Modern Chemical Industry

收录：CSTPCD;;Scopus;北大核心:【北大核心2020】；CSCD:【CSCD_E2023_2024】；

基金：国家自然科学基金项目(21978082)。

语种：中文

中文关键词：电子级高纯盐酸;电感耦合等离子体质谱法(ICP-MS);痕量元素

外文关键词：electronic grade high purity hydrochloric acid;inductively coupled plasma mass spectrometry(ICP-MS);trace element

摘要：为了有效检测电子级高纯盐酸中的痕量元素,利用电感耦合等离子体质谱法(ICP-MS)进行测定,用全基体进样系统(AMS)进样,用标准加入法进行上机检测,无需前处理,避免了在样品前处理时的污染问题。电感耦合等离子体质谱法可以消除多分子离子干扰,降低检出限,提高定量准确性。该方法的检出限为0.05~5.4 ng/L,加标回收率为96%~108%,稳定性RSD均不超过5%;操作简单,结果可靠,适用于高纯盐酸中痕量元素的快速测定。
Inductively coupled plasma mass spectrometry(ICP-MS)is used to effectively detect trace elements in electronic-grade high-purity hydrochloric acid.Total matrix injection system(AMS)is used for sampling,and the standard addition method is used for on-board detection,which does not need pre-treatment and avoids contamination problems during sample pre-treatment.ICP-MS can eliminate the interference of multi-molecular ions,reduce the detection limit and improve the quantitative accuracy.The detection limit is 0.05-5.4 ng·L^(-1),the recoveries are in the range of 96%-108%,and the RSD of stability is less than 5%.This method is simple,can deliver reliable result and is suitable for the rapid determination of trace elements in high purity hydrochloric acid.